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System Peripherals

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Peripherals include vacuum pumps, power supplies, and chillers.

All items are available AS IS or REFURBISHED with warranty.

If you have a need not listed, please call.  
We can locate it.

 


Alcatel
Alcatel / Adixen ATH 1300 M Turbo Pump Lam Research PN# 796-099222-001 Controller and Cable also available
Part Number: M6565621A0
Details

TST Inventory number: 10866
M&W Systems
Dual Channel Chiller -15c to 60c used on Lam Research Rainbow, TCP, and Allaince systems All Chillers are Rebuilt with a 1 year warranty. Ask about our chiller repair program for your equipment.
Part Number: RCP2/28W-RNB
Details

TST Inventory number: 10869
Advanced Energy
RFG 1251 Rf Generator 13.56MHZ Condition New. 90Day Warranty
Part Number: 3155107-001
Details

TST Inventory number: 10870
TST Inventory number: 10870
Advanced Energy
RFG1250 HALO Rf Generator 13.56MHZ Lam Research PN# 660-024637-028
Part Number: 3155027-028
Details

TST Inventory number: 10871
Edwards
Stph 2002c Turbo Pump with controller and 5 Meter cables. Commonly used on Lam 9400se
Part Number: Stph 2002c
Details

TST Inventory number: 10875
TST Inventory number: 10875
TST Inventory number: 10875
TST Inventory number: 10875
TST Inventory number: 10875
TST Inventory number: 10875
Edwards
STPH 1301L Turbo Pump rebuilt with warranty. Commonly used on Lam 9400se
Part Number: STPH 1301L
Details

LAM
ASSY - MICROWAVE MDL - ALLIANCE - CE top chamber assy for Microwave Strip Chamber
Part Number: 852-347339-003
Details

Leybold
Leybold MAG1600 Turbo Pump with Mag DriveL2 controller with 5 Meter cables
Part Number: MAG 1600
Details

TST Inventory number: 15555
TST Inventory number: 15555
TST Inventory number: 15555
TST Inventory number: 15555
TST Inventory number: 15555
TST Inventory number: 15555
ENI
GEN,RF,2MHZ,2.5KW GMW-2502
Part Number: 660-110685-112
Details


   
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